SiFusion Polysilicon Pedestals

SiFusion pedestals are in-situ fixtures that support boats during diffusion and thermal processing. As in all SiFusion products, these pedestals are high-purity, high performance replacements for quartz and silicon carbide fixtures.

SiFusion pedestals represent:

• Proven performance in 150 mm, 200 mm, 300 mm settings
• Slots, rails and pitch - specified by customer
• No fixture-generated particles
• No routine cleaning
• Superior slot accuracy - tolerances never change
• No boat deformation - no robot re-teaching