SiFusion Polysilicon Furnaceware
SiFusion Furnaceware offers greater performance than previously available with quartz and silicon carbide consumables.
All SiFusion products are constructed out of pure poly silicon material, making them the industry’s choice for high purity, low maintenance, cost of ownership and environmental impact. The product line includes components for all vertical furnace applications in 200 mm and 300 mm environments.
SiFusion furnaceware is designed and manufactured for easy installation into the hot zones of all major OEM furnaces, including Tokyo Electron (TEL), Kokusai, Aviza and ASM.
SiFusion Product Suite
Bringing SiFusion components together for an all-silicon hot zone solution fully realizes the advantage of SiFusion technology and poly silicon's inherently superior characteristics.
SiFusion Furnace Process Applications
High Temperature Processes
SiFusion furnaceware performs without deformities in demanding processes reaching temperatures up to 1350°C.
LPCVD Processes
SiFusion's products generate essentially no particles and reduce costly routine cleaning and associated hazardous wastes.
Additional Processes
SiFusion is also ideal for other thermal operations, including the amorphous silicon process.