SiFusion Furnaceware Reduces the Total Cost of Ownership

SiFusion reduces the total cost of ownership for vertical furnaces

The industry has waited more than 20 years for a company to manufacture furnaceware that can tackle the challenges that IC makers face each day.

SiFusion technology from Integrated Materials steps up to these challenges by specifically capitalizing on silicon's thermal and physical characteristics to provide furnaceware with significant improvements over consumable quartz and silicon carbide products.

The patented SiFusion technology enables the manufacture of furnaceware from semiconductor-grade, poly silicon furnaceware that reduces particles and trace metal contamination by more than 50 percent, prevents slip and eliminates routine cleaning - all of which adds up to productivity improvements, increased yields, increased furnace availability and lower cost of ownership.

Already the tool of record at IDMs, including one of the largest semiconductor manufacturers in North America, SiFusion towers, boats, pedestals and injectors are so long-lasting that they can hardly be called "consumables."

Simply submit this form to download our report with a quantitative cost of ownership analysis by Wright Williams & Kelly, Inc. for silicon nitride processes utilizing SiFusion furnaceware in both 200 mm and 300 mm fabs.

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