Liners

In conjunction with injectors and boats, SiFusion liners are an essential element of the semiconductor furnace. Liners provide a uniform path for the gas flow from inlet to exhaust and act as a barrier preventing particles from the outer furnace tube from affecting product yields.

While quartz and silicon carbide liners typically require cleaning quarterly, a SiFusion poly silicon liner calls for no routine cleaning.

Get in touch with Integrated Materials’ Sales Team today!

SiFusion Product Suite

• Boats
• Injectors
• Liners
• Pedestals
• Ring boats
• Shelf boats