Patents

Integrated Materials is the first and only company to successfully manufacture pure poly silicon components for semiconductor furnace applications.

Patent Portfolio for SiFusion

The SiFusion technology breakthrough has earned Integrated Materials 16 U.S. and four international patents. This innovative technology enables the successful manufacture of semiconductor-grade furnace fixtures from poly silicon –- the purest commercial material in the world. Integrated Materials is the first and only company to do this.

Integrated Materials’ expertise and intellectual property on the science of silicon encompass a broad range of critical processes and designs, including:

Preparation and characteristics enhancement of the bulk material
Bonding and welding of pure silicon
Surface preparation of the bulk materials

Patents issued to Integrated Materials, Inc. include:

Adhesive of a silicon and silica composite particularly useful for joining silicon parts
Patent: US7,083,694
Claims: 32
Date: August 1, 2006

Plasma spraying for joining silicon parts
Patent: US7,074,693
Claims: 19
Date: July 11, 2006

Silicon Fixture Supporting Silicon Wafers during High Temperature Processes
Patent: US6,979,659
Claims: 22
Date: December 27, 2005

Two Heat Sources for Welding Silicon
Patent: US6,838,636
Claims: 19
Date: January 4, 2005

High Temperature Hydrogen Anneal of Silicon Wafers Supported on a Silicon Fixture
Patent: US6,727,191
Claims: 18
Date: April 27, 2004

Wafer Support Fixture Composed of Silicon
Patent: US6,617,540
Claims: 15
Date: September 9, 2003

Method of Machining Silicon
Patent: US6,617,225
Claims: 22
Date: September 9, 2003

Welded Silicon Member
Patent: US6,583,377
Claims: 37
Date: June 24, 2003

Silicon Fixture for Supporting Wafers during Thermal Processing
Patent: US6,450,346
Claims: 18
Date: September 24, 2002

Method for Welding Silicon Work Pieces
Patent: US6,403,914
Claims: 22
Date: June 11, 2002

Silicon Support Members for Wafer Processing Fixtures
Patent: US6,357,432
Claims: 28
Date: March 19, 2002

Crack Free Welding of Silicon
Patent: US6,284,997
Claims: 20
Date: September 4, 2001

Method and Apparatus for Fabricating Elongate Crystalline Members
Patent: US6,205,993
Claims: 20
Date: May 27, 2001

Method and Apparatus for Securing Components of Wafer Processing Fixtures
Patent: US6,225,594
Claims: 26
Date: May 01, 2001

Support Members for Wafer Processing Fixtures
Patent: US6,196,211
Claims: 31
Date: March 6, 2001